This text sets out to: define and clarify terms used in specifying nanoprecision mechanisms (accuracy, precision, linearity); provide a guide to the servocontro

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuator

Integrating physical modeling, mathematical analysis, and computer simulation, Instrumentation Design Studies explores a wide variety of specific and practical