Synthesis and Characterization of Silicon Dioxide Thin Films by Plasma Enhances Chemical Vapor Deposition from Diethylsilane and Nitrous Oxide
| Author | : Lan Chen |
| Publisher | : |
| Total Pages | : 120 |
| Release | : 1995 |
| ISBN-10 | : OCLC:34067370 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Synthesis and Characterization of Silicon Dioxide Thin Films by Plasma Enhances Chemical Vapor Deposition from Diethylsilane and Nitrous Oxide by : Lan Chen
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