Silicon Micromachining

Silicon Micromachining
Author :
Publisher : Cambridge University Press
Total Pages : 424
Release :
ISBN-10 : 0521607671
ISBN-13 : 9780521607674
Rating : 4/5 (674 Downloads)

Book Synopsis Silicon Micromachining by : Miko Elwenspoek

Download or read book Silicon Micromachining written by Miko Elwenspoek and published by Cambridge University Press. This book was released on 2004-08-19 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.


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