Silicon Micromachining
Author | : Miko Elwenspoek |
Publisher | : Cambridge University Press |
Total Pages | : 424 |
Release | : 2004-08-19 |
ISBN-10 | : 0521607671 |
ISBN-13 | : 9780521607674 |
Rating | : 4/5 (674 Downloads) |
Book Synopsis Silicon Micromachining by : Miko Elwenspoek
Download or read book Silicon Micromachining written by Miko Elwenspoek and published by Cambridge University Press. This book was released on 2004-08-19 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.