Plasma-enhanced Chemical Vapor Deposition of Silicon Oxynitrides

Plasma-enhanced Chemical Vapor Deposition of Silicon Oxynitrides
Author :
Publisher :
Total Pages : 390
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ISBN-10 : UCAL:C2931813
ISBN-13 :
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Book Synopsis Plasma-enhanced Chemical Vapor Deposition of Silicon Oxynitrides by : Joseph Edward Schoenholtz

Download or read book Plasma-enhanced Chemical Vapor Deposition of Silicon Oxynitrides written by Joseph Edward Schoenholtz and published by . This book was released on 1986 with total page 390 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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The use of a radio frequency (rf) glow discharge or plasma has recently come into favor for the deposition of thin films. In plasma-enhanced chemical vapor depo