Download or read book Microcircuit Engineering 89 written by H. Ahmed and published by Elsevier Publishing Company. This book was released on 1990 with total page 736 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 15th International Conference on Microlithography and related techniques was organised with awareness of the present dynamic international development of microlithography and of the related technologies. The five invited and 131 contributed papers presented in the volume attest to the success of the conference in bringing together leading international experts in the microcosm of modern semiconductor technology to discuss the fascinating interrelations between scientific progress and technical applications.