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MEMS and Nanotechnology for Gas Sensors
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How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relati
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Semiconductor Gas Sensors
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Semiconductor Gas Sensors, Second Edition, summarizes recent research on basic principles, new materials and emerging technologies in this essential field. Chap
Metal Oxide Nanostructures as Gas Sensing Devices
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Advanced MEMS/NEMS Fabrication and Sensors
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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an