Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. T

"New results in the field of ion implantation from the experienced scientists from different countries are presented in this book. Influence of ion implantation

Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo

Comprehensive guide to an important materials science technique for students and researchers.