Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific proc

This book explores vegetable fiber composite as an eco-friendly, biodegradable, and sustainable material that has many potential industrial applications. The us

This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas di

This book focuses on EM propagation characteristics within multilayered plasma-dielectric-metallic media. The method used for analysis is impedance transformati