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Language: en
Pages: 553
Pages: 553
Type: BOOK - Published: 2006 - Publisher: Imperial College Press
In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents r
Language: en
Pages: 606
Pages: 606
Type: BOOK - Published: 2018-02-27 - Publisher: Woodhead Publishing
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, in
Language: en
Pages: 553
Pages: 553
Type: BOOK - Published: 2006-08-10 - Publisher: World Scientific
In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents r
Language: en
Pages: 418
Pages: 418
Type: BOOK - Published: 2006-11-02 - Publisher: John Wiley & Sons
Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges face
Language: en
Pages: 536
Pages: 536
Type: BOOK - Published: 2001 - Publisher: John Wiley & Sons
Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combi
