Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges face

The book provides a pedagogical approach that emphasizes the physical processes of active materials and the design and control of engineering systems. It will a

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, in

In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents r

Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominate