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Semiconductor Wafer Bonding VII : Science, Technology, and Applications
Language: en
Pages: 404
Authors:
Categories: Technology & Engineering
Type: BOOK - Published: 2003 - Publisher: The Electrochemical Society

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Semiconductor Wafer Bonding : Science, Technology, and Applications V
Language: en
Pages: 496
Authors: Charles E. Hunt
Categories: Technology & Engineering
Type: BOOK - Published: 2001 - Publisher: The Electrochemical Society

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Semiconductor Wafer Bonding VIII : Science, Technology, and Applications
Language: en
Pages: 476
Authors:
Categories: Microelectromechanical systems
Type: BOOK - Published: 2005 - Publisher: The Electrochemical Society

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Handbook of Silicon Based MEMS Materials and Technologies
Language: en
Pages: 827
Authors: Markku Tilli
Categories: Technology & Engineering
Type: BOOK - Published: 2015-09-02 - Publisher: William Andrew

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The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that
Wafer Bonding
Language: en
Pages: 510
Authors: Marin Alexe
Categories: Science
Type: BOOK - Published: 2013-03-09 - Publisher: Springer Science & Business Media

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The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration