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Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems
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Process Variations in Microsystems Manufacturing
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This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processi
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Opportunities in Biotechnology for Future Army Applications
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This report surveys opportunities for future Army applications in biotechnology, including sensors, electronics and computers, materials, logistics, and medical