Plasma Electronics

Plasma Electronics
Author :
Publisher : CRC Press
Total Pages : 355
Release :
ISBN-10 : 9781420012279
ISBN-13 : 1420012274
Rating : 4/5 (274 Downloads)

Book Synopsis Plasma Electronics by : Toshiaki Makabe

Download or read book Plasma Electronics written by Toshiaki Makabe and published by CRC Press. This book was released on 2006-03-27 with total page 355 pages. Available in PDF, EPUB and Kindle. Book excerpt: Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,


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