This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It

This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines

The book discusses the underlying physical principles of piezoelectric materials, important properties of ferroelectric/piezoelectric materials used in today’

Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building