Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This b

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p

This book is written for new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formatio

Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were