Microrobotics is an emerging and booming area with many and various applications, including in fields such as industrial/manufacturing robotics, medical robotic

This book provides an introduction to robot-based nanohandling. It presents work on the development of a versatile microrobot-based nanohandling robot station i

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct fu

This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow