Download or read book Microelectronics Technology and Devices--SBMICRO 2007 written by João Antonio Martino and published by The Electrochemical Society. This book was released on 2007 with total page 615 pages. Available in PDF, EPUB and Kindle. Book excerpt: The SBMicro symposium is a forum dedicated to fabrication and modeling of Microsystems, integrated circuits and devices. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators, and MEMS. This issue contains the papers presented at the 2007 conference.