Download or read book Microcircuit Engineering 91 written by A. Paoletti and published by Elsevier Science & Technology. This book was released on 1992 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 17th International Conference on Microlithography focused on the present dynamic international development of microfabrication using lithography and the related technologies. Bringing together leading international experts in the microcosm of modern semiconductor technology, the 7 invited and 109 contributed papers give an ongoing overview of the latest trends in the fabrication and application of microstructures.