Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominate

Special Features: · All the authors of this book are stalwarts in their respective field and are key people in promoting the technology and subject.· This boo

Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges face

The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last d

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, in