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Type: BOOK - Published: 2010-11-02 - Publisher: Springer Science & Business Media
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Com
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Pages: 162
Type: BOOK - Published: 2000 - Publisher: SPIE-International Society for Optical Engineering
Language: en
Pages: 435
Pages: 435
Type: BOOK - Published: 2015-09-11 - Publisher: John Wiley & Sons
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the
Language: en
Pages: 1028
Pages: 1028
Type: BOOK - Published: 2020-04-17 - Publisher: Elsevier
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a part
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Pages: 1227
Type: BOOK - Published: 2004-11-16 - Publisher: Elsevier
The Electrical Engineer's Handbook is an invaluable reference source for all practicing electrical engineers and students. Encompassing 79 chapters, this book i