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MEMS Reliability
Language: en
Pages: 300
Authors: Allyson L. Hartzell
Categories: Technology & Engineering
Type: BOOK - Published: 2010-11-02 - Publisher: Springer Science & Business Media

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The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Com
MEMS Reliability for Critical Applications
Language: en
Pages: 162
Authors: Russell A. Lawton
Categories: Technology & Engineering
Type: BOOK - Published: 2000 - Publisher: SPIE-International Society for Optical Engineering

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Materials and Failures in MEMS and NEMS
Language: en
Pages: 435
Authors: Atul Tiwari
Categories: Technology & Engineering
Type: BOOK - Published: 2015-09-11 - Publisher: John Wiley & Sons

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the
Handbook of Silicon Based MEMS Materials and Technologies
Language: en
Pages: 1028
Authors: Markku Tilli
Categories: Technology & Engineering
Type: BOOK - Published: 2020-04-17 - Publisher: Elsevier

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Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a part
The Electrical Engineering Handbook
Language: en
Pages: 1227
Authors: Wai Kai Chen
Categories: Science
Type: BOOK - Published: 2004-11-16 - Publisher: Elsevier

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The Electrical Engineer's Handbook is an invaluable reference source for all practicing electrical engineers and students. Encompassing 79 chapters, this book i