Related Books
Language: en
Pages: 242
Pages: 242
Type: BOOK - Published: 2019-11-20 - Publisher: MDPI
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly e
Language: en
Pages: 312
Pages: 312
Type: BOOK - Published: 2021-10-12 - Publisher: Springer Nature
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an
Language: en
Pages: 85
Pages: 85
Type: BOOK - Published: 2019-02-28 - Publisher: Springer
This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and
Language: en
Pages: 461
Pages: 461
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press
The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every