Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687

Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687
Author :
Publisher :
Total Pages : 344
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ISBN-10 : UCSD:31822031649445
ISBN-13 :
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Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687 by : Arturo A. Ayón

Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687 written by Arturo A. Ayón and published by . This book was released on 2002-05-23 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.


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