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Pages: 740
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Type: BOOK - Published: 2005 - Publisher: Springer Science & Business Media
Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). Mor
Language: en
Pages: 242
Pages: 242
Type: BOOK - Published: 2000 - Publisher: The Electrochemical Society
Language: en
Pages: 562
Pages: 562
Type: BOOK - Published: 1999-09-07 - Publisher: Elsevier
Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They w
Language: en
Pages: 262
Pages: 262
Type: BOOK - Published: 2000 - Publisher: The Electrochemical Society
Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arrang
Language: en
Pages: 508
Pages: 508
Type: BOOK - Published: 2007-04-04 - Publisher: John Wiley & Sons
The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and