Download or read book Levitation Micro-Systems written by Kirill Poletkin and published by Springer Nature. This book was released on 2020-11-19 with total page 178 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.