Ion Implantation Technology

Ion Implantation Technology
Author :
Publisher : American Institute of Physics
Total Pages : 582
Release :
ISBN-10 : 0735405972
ISBN-13 : 9780735405974
Rating : 4/5 (974 Downloads)

Book Synopsis Ion Implantation Technology by : Edmund G. Seebauer

Download or read book Ion Implantation Technology written by Edmund G. Seebauer and published by American Institute of Physics. This book was released on 2008-12-11 with total page 582 pages. Available in PDF, EPUB and Kindle. Book excerpt: The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).


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The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas