Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c

In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the appli

Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. T

Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo