During the years since the first conference in this series was held at Thousand Oaks, California, in 1970, ion implantation has been an expanding and exciting r

The technique of ion implantation has become a very useful and stable technique in the field of semiconductor device fabrication. This use of ion implantation i

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo

In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the appli