Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo

Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. T

Comprehensive guide to an important materials science technique for students and researchers.

The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas