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As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it becomes increasingly important fo
Handbook of Semiconductor Manufacturing Technology
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Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semi
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Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details th
Semiconductor Manufacturing Handbook
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Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin