This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and

Presents electron-collision cross section data and transport coefficients for gases used in the manufacturing of semiconductor devices from the Electronics and

Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive,

Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.

With the constant emergence of new research and application possibilities, gaseous electronics is more important than ever in disciplines including engineering