Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Int

Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Int

Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building

The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applic

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combi