Market: Scientists, engineers, and graduate students in vacuum technology. This volume presents numerous techniques developed in the early 1960s for the efficie

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field

Market: Students and researchers in space and high-vacuum technology and materials science. This handbook was originally prepared so that workers would not have

This book covers the entire spectrum of assembly, packaging and testing of MEMs (microelectro-mechanical systems) and microsystems, from essential enabling tech

Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of va