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3D and Circuit Integration of MEMS
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3D and Circuit Integration of MEMS

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Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building
Three Dimensional Wafer Level Interconnects for Integration in High Speed, Broadband Packaging and Circuit Applications
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Silicon Micromachined Waveguide Transitions and Three-dimensional Lithography for High Frequency Packaging
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Physical Design for 3D Integrated Circuits
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Physical Design for 3D Integrated Circuits reveals how to effectively and optimally design 3D integrated circuits (ICs). It also analyzes the design tools for 3