Download or read book Series on Emission Scenario Documents Photoresist Use in Semiconductor Manufacturing written by OECD and published by OECD Publishing. This book was released on 2014-09-03 with total page 117 pages. Available in PDF, EPUB and Kindle. Book excerpt: This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry.