The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found i

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the f

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Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the stud