This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoele

This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoele

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with lig