“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, br

This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packag

Semiconductors play a major role in modern microtechnology, especially in microelectronics. Since the dimensions of new microelectronic components, e.g. compute

Expectations of a technological revolution are associated with nanotechnology, and indeed the generation, modification and utilization of objects with tiniest d

"Part of this book adapted from "Introduction aux nanosciences et aux nanotechnologies" published in France by Hermes Science/Lavoisier in 2006."