Owing to their unique characteristics, direct wide bandgap energy, large breakdown field, and excellent electron transport properties, including operation at hi

While group IV or III-V based device technologies have reached their technical limitations (e.g., limited detection wavelength range or low power handling capab

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised

'This book is more suited for researchers already familiar with WBS who are interested in developing new WBG materials and devices since it provides the latest

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on n