"This volume is the joint proceedings of papers presented in Symposium D, 'High-k Insulators and Ferroelectrics for Advanced Microelectronic Devices,' and Sympo

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful a

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, includ