Very thin film materials have emerged as a highly interesting and useful quasi 2D-state functionality. They have given rise to numerous applications ranging fro

This second, comprehensive edition of the pioneering book in this fi eld has been completely revised and extended, now stretching to two volumes. The result is

The method of CVD (chemical vapor deposition) is a versatile technique to fabricate high-quality thin films and structured surfaces in the nanometer regime from

This handy reference is the first comprehensive book covering both fundamentals and recent developments in the field with an emphasis on nanotechnology. Written

More than 99% of all visible matter in the universe occurs as highly ionized gas plasma with high energy content. Electrical low- and atmospheric-pressure plasm