Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building

Mikro- und Nanotechnik haben Wissenschaft und Forschung revolutioniert. In Zukunft werden sie auch den Alltag verändern. Nun liegt der erste Band einer neuen B

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combi

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It

Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage o