Characterization and Metrology for ULSI Technology 2005

Characterization and Metrology for ULSI Technology 2005
Author :
Publisher : American Institute of Physics
Total Pages : 714
Release :
ISBN-10 : UOM:39015069190943
ISBN-13 :
Rating : 4/5 ( Downloads)

Book Synopsis Characterization and Metrology for ULSI Technology 2005 by : David G. Seiler

Download or read book Characterization and Metrology for ULSI Technology 2005 written by David G. Seiler and published by American Institute of Physics. This book was released on 2005-09-29 with total page 714 pages. Available in PDF, EPUB and Kindle. Book excerpt: The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.


Characterization and Metrology for ULSI Technology 2005 Related Books

Characterization and Metrology for ULSI Technology 2005
Language: en
Pages: 714
Authors: David G. Seiler
Categories: Computers
Type: BOOK - Published: 2005-09-29 - Publisher: American Institute of Physics

GET EBOOK

The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges
Istfa 2003
Language: en
Pages: 534
Authors: ASM International
Categories: Technology & Engineering
Type: BOOK - Published: 2003-01-01 - Publisher: ASM International

GET EBOOK

Semiconductor Material and Device Characterization
Language: en
Pages: 800
Authors: Dieter K. Schroder
Categories: Technology & Engineering
Type: BOOK - Published: 2015-06-29 - Publisher: John Wiley & Sons

GET EBOOK

This Third Edition updates a landmark text with the latest findings The Third Edition of the internationally lauded Semiconductor Material and Device Characteri
Microscopy of Semiconducting Materials 2003
Language: en
Pages: 705
Authors: A.G. Cullis
Categories: Technology & Engineering
Type: BOOK - Published: 2018-01-10 - Publisher: CRC Press

GET EBOOK

Modern electronic devices rely on ever-greater miniaturization of components, and semiconductor processing is approaching the domain of nanotechnology. Studies
Electron Microscopy and Analysis 2003
Language: en
Pages: 520
Authors: S McVitie
Categories: Science
Type: BOOK - Published: 2004-02-19 - Publisher: CRC Press

GET EBOOK

Electron microscopy is now a mainstay characterization tool for solid state physicists and chemists as well as materials scientists. Containing the proceedings