Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays

Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays

This concise reference summarizes the latest results in nano-structured thin films, the first to discuss both deposition methods and electronic applications in

This book focuses on the metallic Nano- and Micro-materials (NMMs) fabricated by physical techniques such as atomic diffusion. A new technology for fabricating

Annotation Nanotechnology is an area of science and technology where dimensions and tolerances in the range of 0.1 nm to 100nm play a critical role. Nanotechnol