Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.

Written by a university lecturer with more than forty years experience in plasma technology, this book adopts a didactic approach in its coverage of the theory,

A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and

Non-Thermal Plasma Technology for Polymeric Materials: Applications in Composites, Nanostructured Materials and Biomedical Fields provides both an introduction

Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technologic