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Dielectrics for Nanosystems
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Dielectrics for Nanosystems

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Thin Film Materials, Processes, and Reliability
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Thin Film Materials, Processes, and Reliability

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Semiconductor Wafer Bonding VII : Science, Technology, and Applications
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Atomic Layer Deposition for Semiconductors
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Atomic Layer Deposition for Semiconductors

Authors: Cheol Seong Hwang
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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, log